Structural analysis of DLC thin film using x-ray reflectivity and Raman spectroscopy techniques
The characteristics of sputtered amorphous diamond-like carbon-containing copper (DLC: Cu films) films deposited on Si (100) substrates and Si (111) in argon gas-filled chamber using carbon target under different substrates deposition time, and RF power. The samples were deposited by RF magnetron sp...
| Main Authors: | , , , |
|---|---|
| Format: | Conference or Workshop Item |
| Published: |
2022
|
| Subjects: |
| _version_ | 1796867536775544832 |
|---|---|
| author | Nadzari, Khairul Aizat Omar, Muhammad Firdaus Md. Rudin, Nor Shahira Ismail, Abd. Khamim |
| author_facet | Nadzari, Khairul Aizat Omar, Muhammad Firdaus Md. Rudin, Nor Shahira Ismail, Abd. Khamim |
| author_sort | Nadzari, Khairul Aizat |
| collection | ePrints |
| description | The characteristics of sputtered amorphous diamond-like carbon-containing copper (DLC: Cu films) films deposited on Si (100) substrates and Si (111) in argon gas-filled chamber using carbon target under different substrates deposition time, and RF power. The samples were deposited by RF magnetron sputtering and analyzed using Raman spectroscopy and X-ray reflectivity (XRR) methods. Different parameters of depositions were used to study the structure, thickness, roughness, and density of the samples. The Cu preliminary layer act as a catalyst to growth the DLC thin-film analyzed using XRR analysis to measure thickness, roughness, and density of the thin films. The film structures of the samples were analyzed using Raman spectroscopy with a 532nm laser source. Gaussian peak shapes were used in Raman spectrum fitting to analyzed to measure the D band and G band for both samples. The Films thickness, roughness, and mass density were studied by XRR techniques using XRD to acquire the multilayer structure of thin films grown by magnetron sputtering. |
| first_indexed | 2024-03-05T21:28:44Z |
| format | Conference or Workshop Item |
| id | utm.eprints-103826 |
| institution | Universiti Teknologi Malaysia - ePrints |
| last_indexed | 2024-03-05T21:28:44Z |
| publishDate | 2022 |
| record_format | dspace |
| spelling | utm.eprints-1038262023-11-27T06:30:52Z http://eprints.utm.my/103826/ Structural analysis of DLC thin film using x-ray reflectivity and Raman spectroscopy techniques Nadzari, Khairul Aizat Omar, Muhammad Firdaus Md. Rudin, Nor Shahira Ismail, Abd. Khamim QC Physics The characteristics of sputtered amorphous diamond-like carbon-containing copper (DLC: Cu films) films deposited on Si (100) substrates and Si (111) in argon gas-filled chamber using carbon target under different substrates deposition time, and RF power. The samples were deposited by RF magnetron sputtering and analyzed using Raman spectroscopy and X-ray reflectivity (XRR) methods. Different parameters of depositions were used to study the structure, thickness, roughness, and density of the samples. The Cu preliminary layer act as a catalyst to growth the DLC thin-film analyzed using XRR analysis to measure thickness, roughness, and density of the thin films. The film structures of the samples were analyzed using Raman spectroscopy with a 532nm laser source. Gaussian peak shapes were used in Raman spectrum fitting to analyzed to measure the D band and G band for both samples. The Films thickness, roughness, and mass density were studied by XRR techniques using XRD to acquire the multilayer structure of thin films grown by magnetron sputtering. 2022 Conference or Workshop Item PeerReviewed Nadzari, Khairul Aizat and Omar, Muhammad Firdaus and Md. Rudin, Nor Shahira and Ismail, Abd. Khamim (2022) Structural analysis of DLC thin film using x-ray reflectivity and Raman spectroscopy techniques. In: 10th International Conference on X-Rays and Related Techniques in Research and Industry, ICXRI 2021, 18 August 2021 - 19 August 2021, Virtual, Online. http://dx.doi.org/10.4028/p-x8wahl |
| spellingShingle | QC Physics Nadzari, Khairul Aizat Omar, Muhammad Firdaus Md. Rudin, Nor Shahira Ismail, Abd. Khamim Structural analysis of DLC thin film using x-ray reflectivity and Raman spectroscopy techniques |
| title | Structural analysis of DLC thin film using x-ray reflectivity and Raman spectroscopy techniques |
| title_full | Structural analysis of DLC thin film using x-ray reflectivity and Raman spectroscopy techniques |
| title_fullStr | Structural analysis of DLC thin film using x-ray reflectivity and Raman spectroscopy techniques |
| title_full_unstemmed | Structural analysis of DLC thin film using x-ray reflectivity and Raman spectroscopy techniques |
| title_short | Structural analysis of DLC thin film using x-ray reflectivity and Raman spectroscopy techniques |
| title_sort | structural analysis of dlc thin film using x ray reflectivity and raman spectroscopy techniques |
| topic | QC Physics |
| work_keys_str_mv | AT nadzarikhairulaizat structuralanalysisofdlcthinfilmusingxrayreflectivityandramanspectroscopytechniques AT omarmuhammadfirdaus structuralanalysisofdlcthinfilmusingxrayreflectivityandramanspectroscopytechniques AT mdrudinnorshahira structuralanalysisofdlcthinfilmusingxrayreflectivityandramanspectroscopytechniques AT ismailabdkhamim structuralanalysisofdlcthinfilmusingxrayreflectivityandramanspectroscopytechniques |