High-aspect-ratio, 3-D micromachining of carbon-nanotube forests by micro-electro-discharge machining in air
This paper reports micro-electro-discharge machining of vertically aligned carbon nanotube forests for the formation of high-aspect-ratio, three-dimensional microstructures in the material. The developed forest machining method is a dry process performed in air, generating high-frequency pulses of e...
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| Format: | Book Section |
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IEEE Explorer
2011
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| _version_ | 1796856503977639936 |
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| author | Dahmardeh, M. Khalid, W. Mohamed Ali, Mohamed Sultan Choi, Y. Yaghoobi, P. Nojeh, A. Takahata, K. |
| author_facet | Dahmardeh, M. Khalid, W. Mohamed Ali, Mohamed Sultan Choi, Y. Yaghoobi, P. Nojeh, A. Takahata, K. |
| author_sort | Dahmardeh, M. |
| collection | ePrints |
| description | This paper reports micro-electro-discharge machining of vertically aligned carbon nanotube forests for the formation of high-aspect-ratio, three-dimensional microstructures in the material. The developed forest machining method is a dry process performed in air, generating high-frequency pulses of electrical discharge to locally machine the nanotubes in order to create target shapes in a forest. With this approach, forest microstructures can be fabricated to have varying shapes along their height, unachievable with conventional pre-patterned chemical vapor deposition growth techniques. The use of the pulses with a minimized discharge energy defined with 35 V and 10 pF in the discharge generation circuit leads to an aspect ratio of 20 with the smallest feature of 5 µm in forests without disordering the vertical orientation of the nanotubes. Micromachining of multilayer geometries as well as arrayed needle-like microstructures with angled surfaces is demonstrated. |
| first_indexed | 2024-03-05T18:43:56Z |
| format | Book Section |
| id | utm.eprints-29170 |
| institution | Universiti Teknologi Malaysia - ePrints |
| last_indexed | 2024-03-05T18:43:56Z |
| publishDate | 2011 |
| publisher | IEEE Explorer |
| record_format | dspace |
| spelling | utm.eprints-291702017-02-04T07:28:42Z http://eprints.utm.my/29170/ High-aspect-ratio, 3-D micromachining of carbon-nanotube forests by micro-electro-discharge machining in air Dahmardeh, M. Khalid, W. Mohamed Ali, Mohamed Sultan Choi, Y. Yaghoobi, P. Nojeh, A. Takahata, K. TK Electrical engineering. Electronics Nuclear engineering This paper reports micro-electro-discharge machining of vertically aligned carbon nanotube forests for the formation of high-aspect-ratio, three-dimensional microstructures in the material. The developed forest machining method is a dry process performed in air, generating high-frequency pulses of electrical discharge to locally machine the nanotubes in order to create target shapes in a forest. With this approach, forest microstructures can be fabricated to have varying shapes along their height, unachievable with conventional pre-patterned chemical vapor deposition growth techniques. The use of the pulses with a minimized discharge energy defined with 35 V and 10 pF in the discharge generation circuit leads to an aspect ratio of 20 with the smallest feature of 5 µm in forests without disordering the vertical orientation of the nanotubes. Micromachining of multilayer geometries as well as arrayed needle-like microstructures with angled surfaces is demonstrated. IEEE Explorer 2011 Book Section PeerReviewed Dahmardeh, M. and Khalid, W. and Mohamed Ali, Mohamed Sultan and Choi, Y. and Yaghoobi, P. and Nojeh, A. and Takahata, K. (2011) High-aspect-ratio, 3-D micromachining of carbon-nanotube forests by micro-electro-discharge machining in air. In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). IEEE Explorer, pp. 272-275. ISBN 978-1-4244-9632-7 http://dx.doi.org/10.1109/MEMSYS.2011.5734414 10.1109/MEMSYS.2011.5734414 |
| spellingShingle | TK Electrical engineering. Electronics Nuclear engineering Dahmardeh, M. Khalid, W. Mohamed Ali, Mohamed Sultan Choi, Y. Yaghoobi, P. Nojeh, A. Takahata, K. High-aspect-ratio, 3-D micromachining of carbon-nanotube forests by micro-electro-discharge machining in air |
| title | High-aspect-ratio, 3-D micromachining of carbon-nanotube forests by micro-electro-discharge machining in air |
| title_full | High-aspect-ratio, 3-D micromachining of carbon-nanotube forests by micro-electro-discharge machining in air |
| title_fullStr | High-aspect-ratio, 3-D micromachining of carbon-nanotube forests by micro-electro-discharge machining in air |
| title_full_unstemmed | High-aspect-ratio, 3-D micromachining of carbon-nanotube forests by micro-electro-discharge machining in air |
| title_short | High-aspect-ratio, 3-D micromachining of carbon-nanotube forests by micro-electro-discharge machining in air |
| title_sort | high aspect ratio 3 d micromachining of carbon nanotube forests by micro electro discharge machining in air |
| topic | TK Electrical engineering. Electronics Nuclear engineering |
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