Selective RF wireless control of integrated bulk-micromachined shape-memory-alloy actuators and its microfluidic application

This paper reports wireless microfluidic control enabled by selective operation of multiple bulk-micromachined shape-memory-alloy actuators using radiofrequency external magnetic fields. Each shape-memory-alloy actuator is driven by a wireless resonant heater, which generates heat only when the fiel...

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Main Authors: Mohamed Ali, Mohamed Sultan, Takahata, Kenichi
Format: Book Section
Published: IEEE 2011
Subjects:
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author Mohamed Ali, Mohamed Sultan
Takahata, Kenichi
author_facet Mohamed Ali, Mohamed Sultan
Takahata, Kenichi
author_sort Mohamed Ali, Mohamed Sultan
collection ePrints
description This paper reports wireless microfluidic control enabled by selective operation of multiple bulk-micromachined shape-memory-alloy actuators using radiofrequency external magnetic fields. Each shape-memory-alloy actuator is driven by a wireless resonant heater, which generates heat only when the field frequency is tuned to the resonant frequency of the heater. Multiple actuators coupled with the heater circuits that are designed to have different resonant frequencies in a range of 135-295 MHz are selectively controlled by modulating the field frequency to the resonant frequencies of the corresponding heaters with a constant output power. A wireless microsyringe device that has three actuator-heater components and a flexible parylene reservoir is developed. The 5-µl reservoir is squeezed by the 5-mm-long cantilever-type SMA actuators to eject controlled amounts of liquid from the reservoir. Wireless modification of pH in liquid is demonstrated using the device loaded with acidic solution through the selective control of the three actuators based on the frequency modulation technique.
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spelling utm.eprints-295902017-02-04T08:31:27Z http://eprints.utm.my/29590/ Selective RF wireless control of integrated bulk-micromachined shape-memory-alloy actuators and its microfluidic application Mohamed Ali, Mohamed Sultan Takahata, Kenichi TK Electrical engineering. Electronics Nuclear engineering This paper reports wireless microfluidic control enabled by selective operation of multiple bulk-micromachined shape-memory-alloy actuators using radiofrequency external magnetic fields. Each shape-memory-alloy actuator is driven by a wireless resonant heater, which generates heat only when the field frequency is tuned to the resonant frequency of the heater. Multiple actuators coupled with the heater circuits that are designed to have different resonant frequencies in a range of 135-295 MHz are selectively controlled by modulating the field frequency to the resonant frequencies of the corresponding heaters with a constant output power. A wireless microsyringe device that has three actuator-heater components and a flexible parylene reservoir is developed. The 5-µl reservoir is squeezed by the 5-mm-long cantilever-type SMA actuators to eject controlled amounts of liquid from the reservoir. Wireless modification of pH in liquid is demonstrated using the device loaded with acidic solution through the selective control of the three actuators based on the frequency modulation technique. IEEE 2011 Book Section PeerReviewed Mohamed Ali, Mohamed Sultan and Takahata, Kenichi (2011) Selective RF wireless control of integrated bulk-micromachined shape-memory-alloy actuators and its microfluidic application. In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, Cancun, pp. 1269-1272. ISBN 978-142449632-7 http://dx.doi.org/10.1109/MEMSYS.2011.5734664 10.1109/MEMSYS.2011.5734664
spellingShingle TK Electrical engineering. Electronics Nuclear engineering
Mohamed Ali, Mohamed Sultan
Takahata, Kenichi
Selective RF wireless control of integrated bulk-micromachined shape-memory-alloy actuators and its microfluidic application
title Selective RF wireless control of integrated bulk-micromachined shape-memory-alloy actuators and its microfluidic application
title_full Selective RF wireless control of integrated bulk-micromachined shape-memory-alloy actuators and its microfluidic application
title_fullStr Selective RF wireless control of integrated bulk-micromachined shape-memory-alloy actuators and its microfluidic application
title_full_unstemmed Selective RF wireless control of integrated bulk-micromachined shape-memory-alloy actuators and its microfluidic application
title_short Selective RF wireless control of integrated bulk-micromachined shape-memory-alloy actuators and its microfluidic application
title_sort selective rf wireless control of integrated bulk micromachined shape memory alloy actuators and its microfluidic application
topic TK Electrical engineering. Electronics Nuclear engineering
work_keys_str_mv AT mohamedalimohamedsultan selectiverfwirelesscontrolofintegratedbulkmicromachinedshapememoryalloyactuatorsanditsmicrofluidicapplication
AT takahatakenichi selectiverfwirelesscontrolofintegratedbulkmicromachinedshapememoryalloyactuatorsanditsmicrofluidicapplication