Selective RF wireless control of integrated bulk-micromachined shape-memory-alloy actuators and its microfluidic application
This paper reports wireless microfluidic control enabled by selective operation of multiple bulk-micromachined shape-memory-alloy actuators using radiofrequency external magnetic fields. Each shape-memory-alloy actuator is driven by a wireless resonant heater, which generates heat only when the fiel...
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| Format: | Book Section |
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IEEE
2011
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