Wide range electrostatic MEMS Fabry Perot optical tunable filter: modelling an electrostatic and mechanic beam deflection
A novel wide range electrostatic microelectromechanical system floating Fabry Perot optical tunable filter (MEMS f-FPOTF) is modelled and analyzed in terms of its electro-mechanic behaviour. The composite beam approach has been used to model the floating Fabry Perot cavity. The floating dual membran...
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Springer-Verlag
2011
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