Macrodroplet reduction and growth mechanisms in cathodic arc physical vapor deposition of TiN films
Cathodic arc physical vapor deposition (CAPVD) a technique used for the deposition of hard coatings for tooling applications has many advantages. The main drawback of this technique is the formation of macrodroplets (MDs) during deposition resulting in films with rougher morphology. The MDs contamin...
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| Format: | Article |
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World Scientific Publishing Co
2008
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| _version_ | 1796854162581880832 |
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| author | Ali, M. Hamzah, E. Abbas, T. Mohd Toff, M.R.H. Qazi, I.A. |
| author_facet | Ali, M. Hamzah, E. Abbas, T. Mohd Toff, M.R.H. Qazi, I.A. |
| author_sort | Ali, M. |
| collection | ePrints |
| description | Cathodic arc physical vapor deposition (CAPVD) a technique used for the deposition of hard coatings for tooling applications has many advantages. The main drawback of this technique is the formation of macrodroplets (MDs) during deposition resulting in films with rougher morphology. The MDs contamination and growth mechanisms was investigated in TiN coatings over high-speed steel, as a function of metal ion etching, substrate bias, and nitrogen gas flow rate; it was observed that the latter is the most important factor in controlling the size and number of the macrodroplets. © 2008 World Scientific Publishing Company. |
| first_indexed | 2024-03-05T18:10:16Z |
| format | Article |
| id | utm.eprints-7021 |
| institution | Universiti Teknologi Malaysia - ePrints |
| last_indexed | 2024-03-05T18:10:16Z |
| publishDate | 2008 |
| publisher | World Scientific Publishing Co |
| record_format | dspace |
| spelling | utm.eprints-70212017-10-22T06:51:57Z http://eprints.utm.my/7021/ Macrodroplet reduction and growth mechanisms in cathodic arc physical vapor deposition of TiN films Ali, M. Hamzah, E. Abbas, T. Mohd Toff, M.R.H. Qazi, I.A. TJ Mechanical engineering and machinery Cathodic arc physical vapor deposition (CAPVD) a technique used for the deposition of hard coatings for tooling applications has many advantages. The main drawback of this technique is the formation of macrodroplets (MDs) during deposition resulting in films with rougher morphology. The MDs contamination and growth mechanisms was investigated in TiN coatings over high-speed steel, as a function of metal ion etching, substrate bias, and nitrogen gas flow rate; it was observed that the latter is the most important factor in controlling the size and number of the macrodroplets. © 2008 World Scientific Publishing Company. World Scientific Publishing Co 2008-10 Article PeerReviewed Ali, M. and Hamzah, E. and Abbas, T. and Mohd Toff, M.R.H. and Qazi, I.A. (2008) Macrodroplet reduction and growth mechanisms in cathodic arc physical vapor deposition of TiN films. Surface Review and Letters , 15 (5). pp. 653-659. ISSN 0218625X http://doi.dx.org/10.1142/S0218625X08011810 |
| spellingShingle | TJ Mechanical engineering and machinery Ali, M. Hamzah, E. Abbas, T. Mohd Toff, M.R.H. Qazi, I.A. Macrodroplet reduction and growth mechanisms in cathodic arc physical vapor deposition of TiN films |
| title | Macrodroplet reduction and growth mechanisms in cathodic arc physical vapor deposition of TiN films |
| title_full | Macrodroplet reduction and growth mechanisms in cathodic arc physical vapor deposition of TiN films |
| title_fullStr | Macrodroplet reduction and growth mechanisms in cathodic arc physical vapor deposition of TiN films |
| title_full_unstemmed | Macrodroplet reduction and growth mechanisms in cathodic arc physical vapor deposition of TiN films |
| title_short | Macrodroplet reduction and growth mechanisms in cathodic arc physical vapor deposition of TiN films |
| title_sort | macrodroplet reduction and growth mechanisms in cathodic arc physical vapor deposition of tin films |
| topic | TJ Mechanical engineering and machinery |
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