Diamond turning of soft semiconductors to obtain nanometric mirror surfaces

Diamond cutting is a viable alternative to grinding and polishing in the fabrication of high-quality soft semiconductors. Investigation of indentation provides useful information for understanding the practical diamond cutting process of brittle materials. Cutting forces and temperatures were analys...

وصف كامل

التفاصيل البيبلوغرافية
المؤلفون الرئيسيون: Fang, Fengzhou Z., Venkatesh, Vasisht,C., Zhang, G.X.
التنسيق: مقال
اللغة:English
منشور في: Springer Verlag 2002
الموضوعات:
الوصول للمادة أونلاين:http://eprints.utm.my/7388/1/VenkateshVC2003_DiamondTurningSoftSemiconductorObtain.pdf