Diamond turning of soft semiconductors to obtain nanometric mirror surfaces
Diamond cutting is a viable alternative to grinding and polishing in the fabrication of high-quality soft semiconductors. Investigation of indentation provides useful information for understanding the practical diamond cutting process of brittle materials. Cutting forces and temperatures were analys...
| Auteurs principaux: | , , |
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| Format: | Article |
| Langue: | English |
| Publié: |
Springer Verlag
2002
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| Sujets: | |
| Accès en ligne: | http://eprints.utm.my/7388/1/VenkateshVC2003_DiamondTurningSoftSemiconductorObtain.pdf |