Device design consideration for nanoscale MOSFET using semiconductor TCAD tools

The evolution of metal-oxide-semiconductor field effect transistor (MOSFET) technology has been governed mainly by device scaling over the past twenty years. One of the key questions concerning future ULSI technology is whether MOSFET devices can be scaled to 100 nmchannel length and beyond for cont...

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Detalhes bibliográficos
Principais autores: Teoh, Chin Hong, Ismail, Razali
Formato: Conference or Workshop Item
Idioma:English
Publicado em: 2006
Assuntos:
Acesso em linha:http://eprints.utm.my/7496/1/Razali_Ismail_2006_Device_Design_Consideration_for_Nanoscale.pdf