Effect of phosphate buffered saline solutions on top-down fabricated ZnO nanowire field effect transistor

Effect of phosphate buffered saline solutions on top-down fabricated ZnO nanowire field effect transistor

ZnO based nanowire FETs have been fabricated by implementing a top-down approach, which uses optical photolithography, atomic layer deposition (ALD) of ZnO thin film, and anisotropic plasma etching. The effects of Phosphate Buffered Saline (PBS) solution on the surface of ZnO nanowire were investiga...

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Bibliographic Details
Main Authors:	Sultan, S. M., De Planque, M. R. R., Ashburn, P., Chong, H. M. H.
Format:	Article
Language:	English
Published:	Hindawi Limited 2017
Subjects:	TK Electrical engineering. Electronics Nuclear engineering
Online Access:	http://eprints.utm.my/76517/1/SMSultan2017_EffectofPhosphateBufferedSalineSolutions.pdf

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