Deposition and characterization of TiN-coated steels at various N 2 gas flow rates with constant etching by using capvd technique
Cathodic Arc Physical Vapor Deposition (CAPVD), a technique used for the deposition of hard coatings, for tooling applications, has many advantages. The main drawback of this technique is the formation of macrodroplets (MDs) during deposition, resulting in films with rougher morphology. Constant etc...
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| Format: | Article |
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World Scientific
2007
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| author | Ali, Mubarak Hamzah, Esah Mohd Toff, Mohd Radzi |
| author_facet | Ali, Mubarak Hamzah, Esah Mohd Toff, Mohd Radzi |
| author_sort | Ali, Mubarak |
| collection | ePrints |
| description | Cathodic Arc Physical Vapor Deposition (CAPVD), a technique used for the deposition of hard coatings, for tooling applications, has many advantages. The main drawback of this technique is the formation of macrodroplets (MDs) during deposition, resulting in films with rougher morphology. Constant etching, by increasing nitrogen gas flow rate up to 200 sccm, helped in reducing the MD size and number; at higher rates, of say 300 sccm, the behavior was reversed. Minimum value of surface roughness recorded at 200 sccm was measured via both surface roughness tester and atomic force microscopy (AFM). Micro-Vickers hardness of TiN-coated tool showed about 564% times increase in hardness than the uncoated one. Scratch tester was used to study the critical loads for the coating and the excellent adhesion achievable, of say 200 sccm, was demonstrated, with relevance to the various modes. |
| first_indexed | 2024-03-05T18:11:45Z |
| format | Article |
| id | utm.eprints-7696 |
| institution | Universiti Teknologi Malaysia - ePrints |
| last_indexed | 2024-03-05T18:11:45Z |
| publishDate | 2007 |
| publisher | World Scientific |
| record_format | dspace |
| spelling | utm.eprints-76962009-01-14T03:01:50Z http://eprints.utm.my/7696/ Deposition and characterization of TiN-coated steels at various N 2 gas flow rates with constant etching by using capvd technique Ali, Mubarak Hamzah, Esah Mohd Toff, Mohd Radzi QC Physics Cathodic Arc Physical Vapor Deposition (CAPVD), a technique used for the deposition of hard coatings, for tooling applications, has many advantages. The main drawback of this technique is the formation of macrodroplets (MDs) during deposition, resulting in films with rougher morphology. Constant etching, by increasing nitrogen gas flow rate up to 200 sccm, helped in reducing the MD size and number; at higher rates, of say 300 sccm, the behavior was reversed. Minimum value of surface roughness recorded at 200 sccm was measured via both surface roughness tester and atomic force microscopy (AFM). Micro-Vickers hardness of TiN-coated tool showed about 564% times increase in hardness than the uncoated one. Scratch tester was used to study the critical loads for the coating and the excellent adhesion achievable, of say 200 sccm, was demonstrated, with relevance to the various modes. World Scientific 2007-02 Article PeerReviewed Ali, Mubarak and Hamzah, Esah and Mohd Toff, Mohd Radzi (2007) Deposition and characterization of TiN-coated steels at various N 2 gas flow rates with constant etching by using capvd technique. Surface Review and Letters, 14 (1). pp. 93-100. ISSN 0218-625X http://dx.doi.org/10.1142/S0218625X07009104 10.1142/S0218625X07009104 |
| spellingShingle | QC Physics Ali, Mubarak Hamzah, Esah Mohd Toff, Mohd Radzi Deposition and characterization of TiN-coated steels at various N 2 gas flow rates with constant etching by using capvd technique |
| title | Deposition and characterization of TiN-coated steels at various N 2 gas flow rates with constant etching by using capvd technique |
| title_full | Deposition and characterization of TiN-coated steels at various N 2 gas flow rates with constant etching by using capvd technique |
| title_fullStr | Deposition and characterization of TiN-coated steels at various N 2 gas flow rates with constant etching by using capvd technique |
| title_full_unstemmed | Deposition and characterization of TiN-coated steels at various N 2 gas flow rates with constant etching by using capvd technique |
| title_short | Deposition and characterization of TiN-coated steels at various N 2 gas flow rates with constant etching by using capvd technique |
| title_sort | deposition and characterization of tin coated steels at various n 2 gas flow rates with constant etching by using capvd technique |
| topic | QC Physics |
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