Surface roughness and morphology analysis using an atomic force microscopy of polycrystalline diamond coated Si3N4 deposited by microwave plasma assisted chemical vapor deposition

Surface roughness and morphology analysis using an atomic force microscopy of polycrystalline diamond coated Si3N4 deposited by microwave plasma assisted chemical vapor deposition

Diamond is the hardest material and has high chemical resistant which is one form of carbon. In the present work a study was carried out on polycrystalline diamond coated Si3N4 substrate. The diamond was deposited by Microwave Plasma Assisted Chemical Vapor Deposition (MPACVD) under varying depositi...

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Detalhes bibliográficos
Main Authors:	Purniawan, A., Hamzah, Esah, Mohd Toff, Mohd Radzi
Formato:	Artigo
Publicado em:	Scitec Publications Ltd. 2008
Assuntos:	TJ Mechanical engineering and machinery

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