Finite element analysis of silicon nanowire array based SAW gas sensor
This work presents the design and finite element analysis of a surface acoustic wave (SAW)-based sensor for the detection of volatile organic compound (VOC) gases. The effect of silicon nanowire array (SiNWA) on a 128º YX-lithium niobate (LiNbO3) substrate for sensing the VOC gases was simulated usi...
Main Authors: | Ahmad Asri, Muhammad Izzudin, Hasan, Md. Nazibul, Ahmad Fua’ad, Mariatul Rawdhah, Abd. Hamid, Fatimah Khairiah, Md. Yunos, Yusri, Mohamed Ali, Mohamed Sultan |
---|---|
Format: | Article |
Language: | English |
Published: |
Penerbit UTM Press
2021
|
Subjects: | |
Online Access: | http://eprints.utm.my/97820/1/YusriMdYunos2021_FiniteElementAnalysisofSiliconNanowire.pdf |
Similar Items
-
Design and analysis of silicon nanowire array based on SAW gas sensor
by: Ahmad Asri, Muhammad Izzudin, et al.
Published: (2022) -
Design and analysis of silicon nanowire array based on SAW gas sensor
by: Ahmad Asri, Muhammad Izzudin, et al.
Published: (2022) -
MEMS gas sensors: a review
by: Ahmad Asri, Muhammad Izzudin, et al.
Published: (2021) -
Silicon nanostructure based surface acoustic wave gas sensor
by: Asri, Muhammad Izzudin Ahmad, et al.
Published: (2022) -
Self-healing fluidic dielectric elastomer actuator
by: Ahmad Fuaad, Mariatul Rawdhah, et al.
Published: (2022)