Effect of surface pretreatments on the deposition of polycrystalline diamond on silicon nitride substrates using hot filament chemical vapor deposition method

The deposition of diamond films on a silicon nitride (Si3N4) substrate is an attractive technique for industrial applications because of the excellent properties of diamond. Diamond possesses remarkable physical and mechanical properties such as chemical resistant, extreme hardness and highly wears...

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Bibliographic Details
Main Author: Awang Sh'ri, Dayangku Noorfazidah
Format: Thesis
Language:English
Published: 2009
Subjects:
Online Access:http://eprints.utm.my/9997/1/DayangkuNoorfazidahAwangMFKM2009.pdf