The inspection quality to detect scratch using robot vision

Automated Robotic vision helps to prevent quality problems from occurring.In this research, the concept and operation of robot inspection in fabricating the integrated circuit (IC) is being discussed comprehensively.The results showed the advantages and disadvantages of using this technology to furt...

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Bibliographic Details
Main Authors: Awang Che Da, Rohani, Mohd Nawi, Nabihah, Jagathesan, Durga Devi, Mohd Azam, Nurul Fatihah, Rajemi, Mohamad Farizal
Format: Conference or Workshop Item
Language:English
Published: 2013
Subjects:
Online Access:https://repo.uum.edu.my/id/eprint/11613/1/p151.pdf
Description
Summary:Automated Robotic vision helps to prevent quality problems from occurring.In this research, the concept and operation of robot inspection in fabricating the integrated circuit (IC) is being discussed comprehensively.The results showed the advantages and disadvantages of using this technology to further improve the quality of IC fabrication