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    The Recent Progress of MEMS/NEMS Resonators by Lei Wei, Xuebao Kuai, Yidi Bao, Jiangtao Wei, Liangliang Yang, Peishuai Song, Mingliang Zhang, Fuhua Yang, Xiaodong Wang

    Published 2021-06-01
    “…The material properties, resonance mode, and application in different fields such as gyroscope of the hemispherical structure, microdisk structure, drum resonator are reviewed. …”
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