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Effect of substrate temperature on the properties of diamond-like carbon deposited by PECVD in methane atmosphere
by
Sarmid, Suriany
,
Oeraman
, Karim
,
Ismail, Bakar
,
Sakrani, Samsudi
Published 2006
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Institution
Universiti Teknologi Malaysia - ePrints
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Ismail, Bakar
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Oeraman, Karim
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Sakrani, Samsudi
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Sarmid, Suriany
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English
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