Effects of annealing on the electro-optical properties of a-Si:H thin films deposited by D.C. and pulsed PECVD by Seck, Chai Lim, Boon, Tong Goh, Abdul, Rahman Saadah

“…Hydrogenated amorphous silicon thin films studied in this work were prepared by d.c. and pulsed PECVD technique at a fixe d silane flow-rates of 10 sc cm and 40 sccm. …”
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