Showing 1 - 4 results of 4 for search '"4H-SiC homoepitaxial layers"', query time: 0.58s Refine Results
  1. 1
    Study on the Surface Structure of N-Doped 4H-SiC Homoepitaxial Layer Dependence on the Growth Temperature and C/Si Ratio Deposited by CVD

    Study on the Surface Structure of N-Doped 4H-SiC Homoepitaxial Layer Dependence on the Growth Temperature and C/Si Ratio Deposited by CVD by Zhuorui Tang, Lin Gu, Hongping Ma, Kefeng Dai, Qian Luo, Nan Zhang, Jiyu Huang, Jiajie Fan

    Published 2023-01-01
    Subjects: “…4H-SiC homoepitaxial layers…”
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    Article
  2. 2
    Research on the Influence of Carbon Sources and Buffer Layers on the Homogeneous Epitaxial Growth of 4H-SiC

    Research on the Influence of Carbon Sources and Buffer Layers on the Homogeneous Epitaxial Growth of 4H-SiC by Weilong Yuan, Yicheng Pei, Yunkai Li, Ning Guo, Xiuhai Zhang, Xingfang Liu

    Published 2024-04-01
    Subjects: “…4H-SiC homoepitaxial layer…”
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    Article
  3. 3
    Influence of Temperature and Flow Ratio on the Morphology and Uniformity of 4H-SiC Epitaxial Layers Growth on 150 mm 4° Off-Axis Substrates

    Influence of Temperature and Flow Ratio on the Morphology and Uniformity of 4H-SiC Epitaxial Layers Growth on 150 mm 4° Off-Axis Substrates by Zhuorui Tang, Lin Gu, Hongping Ma, Chaobin Mao, Sanzhong Wu, Nan Zhang, Jiyu Huang, Jiajie Fan

    Published 2022-12-01
    Subjects: “…4H-SiC homoepitaxial layer…”
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    Article
  4. 4
    The Optimizing Effect of Nitrogen Flow Ratio on the Homoepitaxial Growth of 4H-SiC Layers

    The Optimizing Effect of Nitrogen Flow Ratio on the Homoepitaxial Growth of 4H-SiC Layers by Weilong Yuan, Yicheng Pei, Ning Guo, Yunkai Li, Xiuhai Zhang, Xingfang Liu

    Published 2023-06-01
    Subjects: “…4H-SiC homoepitaxial layer…”
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    Article

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