Fabrication and Polishing Performance of Diamond Self-Sharpening Gel Polishing Disk by Lanxing Xu, Kaiping Feng, Liang Zhao, Binghai Lyu

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Understanding the Mechanisms of SiC–Water Reaction during Nanoscale Scratching without Chemical Reagents by Zhihao Cheng, Qiufa Luo, Jing Lu, Zige Tian

Subjects: “…4H-SiC wafer…”
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Experimental Study on Shear Rheological Polishing of Si Surface of 4H-SiC Wafer by Peng Li, Julong Yuan, Minghui Zhu, Jianxing Zhou, Binghai Lyu

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Machine learning methods for prediction analyses of 4H–SiC microfabrication via femtosecond laser processing by Xinxin Li, Haipeng Wang, Bing Wang, Yingchun Guan

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