EUV Lithography: State-of-the-Art Review by Nan Fu, Yanxiang Liu, Xiaolong Ma, Zanfeng Chen

Subjects: Get full text

Investigating the Degradation of EUV Transmittance of an EUV Pellicle Membrane by Seong Ju Wi, Yong Ju Jang, Dong Gi Lee, Seon Yong Kim, Jinho Ahn

Subjects: “…EUV pellicle…”
Get full text

Ru/Ta bilayer approach to EUV mask absorbers: Experimental patterning and simulated imaging perspective by Devesh Thakare, Jean-François de Marneffe, Annelies Delabie, Vicky Philipsen

Subjects: “…EUV lithography…”
Get full text

Study on ZrSi₂ as a Candidate Material for Extreme Ultraviolet Pellicles by Seong Ju Wi, Won Jin Kim, Haneul Kim, Dongmin Jeong, Dong Gi Lee, Jaehyuck Choi, Sang Jin Cho, Lan Yu, Jinho Ahn

Subjects: “…EUV pellicle…”
Get full text

Development of the Solar EUV Telescope Engineering Model for a Satellite by Sun-Min Lee, Min-Hwan Jang, Eun-Seok Park

Subjects: Get full text

Visualizing the ultra-structure of microorganisms using table-top extreme ultraviolet imaging by Chang Liu, Wilhelm Eschen, Lars Loetgering, Daniel S. Penagos Molina, Robert Klas, Alexander Iliou, Michael Steinert, Sebastian Herkersdorf, Alexander Kirsche, Thomas Pertsch, Falk Hillmann, Jens Limpert, Jan Rothhardt

Subjects: “…EUV…”
Get full text

Comparative analysis of extreme ultraviolet solar radiation proxies during minimum activity levels by A. G. Elias, C. R. Martinis, B. F. de Haro Barbas, F. D. Medina, B. S. Zossi, M. Fagre, T. Duran

Subjects: “…solar euv radiation…”
Get full text

Characterization of Ru4-xTax (x = 1,2,3) alloy as material candidate for EUV low-n mask by Meiyi Wu, Jean-François de Marneffe, Karl Opsomer, Christophe Detavernier, Annelies Delabie, Philipp Naujok, Özge Caner, Andy Goodyear, Mike Cooke, Qais Saadeh, Victor Soltwisch, Frank Scholze, Vicky Philipsen

Subjects: “…EUV lithography…”
Get full text

Spectral Imager of the Solar Atmosphere: The First Extreme-Ultraviolet Solar Integral Field Spectrograph Using Slicers by Ariadna Calcines Rosario, Frederic Auchère, Alain Jody Corso, Giulio Del Zanna, Jaroslav Dudík, Samuel Gissot, Laura A. Hayes, Graham S. Kerr, Christian Kintziger, Sarah A. Matthews, Sophie Musset, David Orozco Suárez, Vanessa Polito, Hamish A. S. Reid, Daniel F. Ryan

Subjects: “…EUV spectroscopy…”
Get full text

Evaluation of H2 Plasma‐Induced Damage in Materials for EUV Lithography by Eun‐Seok Choe, Seungwook Choi, Ansoon Kim, Kwan‐Yong Kim, Hee‐Jung Yeom, Min Young Yoon, Seongwan Hong, Dong‐Wook Kim, Jung‐Hyung Kim, Hyo‐Chang Lee

Subjects: “…EUV lithography…”
Get full text

Dynamics and Kinematics of the EUV Wave Event on 6 May 2019 by Ramesh Chandra, P. F. Chen, Pooja Devi, Reetika Joshi, Y. W. Ni

Subjects: “…EUV wave…”
Get full text

Solar EUV‐Enhancement and Thermospheric Disturbances by C. Briand, K. Doerksen, F. Deleflie

Subjects: “…solar EUV‐flux…”
Get full text

Impurity Behavior in Plasma Recovery after a Vacuum Failure in the Experimental Advanced Superconducting Tokamak by Zihang Zhao, Ling Zhang, Ruijie Zhou, Yang Yang, Wenmin Zhang, Yunxin Cheng, Shigeru Morita, Ang Ti, Ailan Hu, Zhen Sun, Fengling Zhang, Weikuan Zhao, Zhengwei Li, Yiming Cao, Guizhong Zuo, Haiqing Liu

Subjects: Get full text

A time dependent relation between EUV solar flare light-curves from lines with differing formation temperatures by Thiemann Edward M.B., Eparvier Francis G., Woods Thomas N.

Subjects: Get full text

Solar Spectral Proxy Irradiance from GOES (SSPRING): a model for solar EUV irradiance by Suess Katherine, Snow Martin, Viereck Rodney, Machol Janet

Subjects: Get full text

On Generalized Additive Models for Representation of Solar EUV Irradiance by Daniel A. Brandt, Erick F. Vega, Aaron J. Ridley

Subjects: Get full text

Ionospheric trends in Southern Hemisphere stations due to the increasing greenhouse gases concentration by José V. Venchiarutti, Blas F. de Haro, Ana G. Elías

Subjects: Get full text

On the inclusion of data from solar cycle 19 to estimate F2 layer characteristic long term trends by Blas F. de Haro Barbas, Ana G. Elias

Subjects: Get full text

Ptychographic imaging of nanoscale 3D objects with soft x-ray synchrotron and EUV table-top sources by Krasnov Vitaly, Dorney Kevin, Larsen Esben, Makhotkin Igor, Scheerder Jeroen, Soltwisch Victor, van der Heide Paul, Fleischmann Claudia

Subjects: Get full text

Solar Demon – an approach to detecting flares, dimmings, and EUV waves on SDO/AIA images by Kraaikamp Emil, Verbeeck Cis

Subjects: Get full text