Focused Ion Beam Microfabrication by Melngailis, John, Lezec, Henri J., Musil, Christian R., Mahoney, Leonard J., Chu, Alex, Chu, Larry, Antoniadis, Dimitri A., Vignaud, Dominique, Liao, Kenneth S., Shimase, Akira, Chung, James E., Etchin, Sergey, Kazior, Thomas E., Ro, Jaesang, Thompson, Carl V., Chiang, Tony P., Chu, William, Smith, Henry I., Hartney, Mark A., Shaver, D. C., Xu, Xin, Della Ratta, Anthony D., Sosonkina, Jane

Subjects: “…Focused Ion Beam Implantation of Transistor Optimization…”
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