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    Comprehensive Comparison of MOCVD- and LPCVD-SiN<sub>x</sub> Surface Passivation for AlGaN/GaN HEMTs for 5G RF Applications by Longge Deng, Likun Zhou, Hao Lu, Ling Yang, Qian Yu, Meng Zhang, Mei Wu, Bin Hou, Xiaohua Ma, Yue Hao

    Published 2023-11-01
    “…In this paper, we systematically investigated the differences between the SiN<sub>x</sub>/GaN interface of two high-temperature passivation schemes, MOCVD-SiN<sub>x</sub> and LPCVD-SiN<sub>x</sub>, and investigated their effects on the ohmic contact mechanism. …”
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