Analysis of nonlinear vibration of nano/microelectromechanical system switch induced by electromagnetic force under zero initial conditions by Naveed Anjum, Ji-Huan He

“…A significant phenomenon associated with devices used in nano/microelectromechanical systems (N/MEMS) is the dynamic pull-in instability. …”
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Proof-of-Concept Vacuum Microelectronic NOR Gate Fabricated Using Microelectromechanical Systems and Carbon Nanotube Field Emitters by Tasso von Windheim, Kristin H. Gilchrist, Charles B. Parker, Stephen Hall, James B. Carlson, David Stokes, Nicholas G. Baldasaro, Charles T. Hess, Leif Scheick, Bernard Rax, Brian Stoner, Jeffrey T. Glass, Jason J. Amsden

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Integrating Resonator to Enhance Magnetometer Microelectromechanical System Implementation with ASIC Compatible CMOS 0.18 μm Process by Chih-Hsuan Lin, Chao-Hung Song, Kuei-Ann Wen

Subjects: “…microelectromechanical systems…”
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Method of Ga removal from a specimen on a microelectromechanical system-based chip for in-situ transmission electron microscopy by Yena Kwon, Byeong-Seon An, Yeon-Ju Shin, Cheol-Woong Yang

“…The specimen on the microelectromechanical system (MEMS)-based chip is commonly prepared by focused ion beam (FIB) milling and ex-situ lift-out (EXLO). …”
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Modeling the mechanical response of microelectromechanical system (MEMS)-based sensors to volatile alcohol vapors: A finite element analysis by Haya Alrashed, Abdulfattah Obeid, Hamad Albrithen, Muthumareeswaran Muthuramamoorthy, Shofiur Rahman, Mahmoud A. Al-Gawati, Abdullah N. Alodhayb

“…The development of microelectromechanical system-based sensors, such as microcantilever sensors, has garnered considerable interest across various fields. …”
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Optimization of the Geometry of a Microelectromechanical System Testing Device for SiO₂—Polysilicon Interface Characterization by Daniel Calegaro, Stefano Mariani, Massimiliano Merli, Giacomo Ferrari

“…Microelectromechanical systems (MEMSs) are small-scale devices that combine mechanical and electrical components made through microfabrication techniques. …”
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Time-varying disturbance observer based on regulating boundary layer thickness sliding mode control for microelectromechanical systems gyroscope by Van Nam Giap, Hong-Son Vu, Shyh-Chour Huang

“…This paper presents a robust control methodology for a microelectromechanical systems gyroscope, which named time-varying disturbance observer based on regulating boundary layer thickness sliding mode control First, the micro electromechanical systems gyroscope mathematical model has been analyzed. …”
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Development of Highly Sensitive and Thermostable Microelectromechanical System Pressure Sensor Based on Array-Type Aluminum–Silicon Hybrid Structures by Min Li, Yang Xiao, Jiahong Zhang, Qingquan Liu, Xianglong Jiang, Wenhao Hua

“…In order to meet the better performance requirements of pressure detection, a microelectromechanical system (MEMS) piezoresistive pressure sensor utilizing an array-type aluminum–silicon hybrid structure with high sensitivity and low temperature drift is designed, fabricated, and characterized. …”
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Design and Demonstration of a Microelectromechanical System Single-Ring Resonator with Inner Ring-Shaped Spring Supports for Inertial Sensors by Imran Khan, Ahmad Rahbar Ranji, Gnanesh Nagesh, David S.-K. Ting, Mohammed Jalal Ahamed

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SiGe virtual substrate engineering for integration of III-V materials, microelectromechanical systems, and strained silicon MOSFETs with silicon by Currie, Matthew Thomas, 1973-

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Basic design of RF switch using MEMS technology / [microfilm] by Ahmad Hazry Idrus

Subjects: “…Microelectromechanical systems -- Design and construction Microfabrication…”

Mems and microsystems : design, manufacture, and packaging / by Hsu, Tai-Ran 332645

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Introduction to microsystem technology : a guide for students / by 439304 Gerlach, Gerald

Subjects: “…Microelectromechanical systems…”

Micro and nano mechanical testing of materials and devices / by Yang, Fuqian, Li, James C. M. (James Chen-Min), 1925-

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MEMS and microsystems : design and manufacture / by Hsu, Tai-Ran 332645

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Introduction to microfluidics / by 207241 Tabeling, P.

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Analytical modeling for determination of pull-in voltage for an electrostatic actuated MEMS cantilever beam / by 361243 Leow, Cheah Wei, Abu Bakar Mohammad, 1959-, Norazan Mohd. Kassim, IEEE International Conference on Semiconductor Electronics (2002 : Penang)

Subjects: “…Microelectromechanical systems…”

MEMS, MOEMS, and micromachining II : 3-4 April, 2006, Strasbourg, France / by Urey, Hakan, 1970-, El-Fatatry, Ayman

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BioMEMS / by Urban, Gerald A.

Subjects: “…Microelectromechanical systems…”

Modeling of electrostatic actuated mems cantilever beam for application as optical switch / by 361243 Leow, Cheah Wei

Subjects: “…Microelectromechanical systems…”