Novel etch-stop materials for silicon micromachining by Wu, Kenneth Chu-Chao

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Micromachined high-g accelerometers : a review by Narasimhan, Vinayak, Li, Holden, Miao, Jianmin

“…Additionally, trends in high-g micromachined accelerometer development both in research and in the market are discussed.…”
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Development of a high performance micromachined gripper by Tok, Wee Keong.

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Investigation of the laser material interaction for glass micromachining by Seow, Wei Liang

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A multiprocess machine tool for compound micromachining by Rahman, M., Asad, A.B.M.A, Masaki, T., Saleh, Tanveer, Wong, Y.S., Senthil Kumar, A.

“…;(b)processcontrol;(c)processdevelopmenttoachieve the necessaryaccuracyandqualityand(d)on-machinemeasurementandinspection.Anintegrated effort intotheseareashasresultedinsuccessfulfabricationofmicrostructuresthatareabletomeetthe miniaturizationdemandsoftheindustry.Thispaperpresentsafewtool-basedapproachesthat integratemicro-EDM,micro-EDG,microturningandmicrogrindingtoproduceminiaturecomponents on thesamemachinetoolplatforminordertodemonstratethecapabilitiesofcompound micromachining.…”
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Micromachined multimode interference device in flat-fiber by Ambran, S., Holmes, C., Gates, J.C., Webb, A.S., Adikan, Faisal Rafiq Mahamd, Smith, P.G.R., Sahu, J.K.

“…We demonstrate a new approach for fabricating multimode interference (MMI) devices using micromachining of a novel flat-fiber platform. A 1x3 splitter has been demonstrated together with spatial output mode control by index tuning of material within micromachined trenches.…”
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Thermal response of silicon during virtual laser micromachining by Muhammad Hasri, Ibrahim

“…This project presents thermal response of silicon during virtual laser micromachining based on finite element method. Predictable models were developed using ALGOR FE code to simulate laser micromachining and to predict temperature distribution in silicon due to laser material interaction. …”
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Micromachined infrared detector using wafer bonding technology by Devoto, Roberto J

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Design and fabrication of a thin film micromachined accelerometer by Novack, Mitchell J. (Mitchell Joseph)

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Laser micromachining of active and passive photonic integrated circuits by Cho, Seong-Ho, 1966-

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Laser Micromachining of Active and Passive Photonic Integrated Circuits by Cho, Seong-Ho

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Micromachined printheads for the direct evaporative patterning of organic materials by Leblanc, Valérie, Ph. D. Massachusetts Institute of Technology

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Silver nanoparticle structures realized by digital surface micromachining by Schmidt, Martin Arnold, Lam, Eric Wing-Jing, Li, Hanqing

“…We report a new surface micromachining process using commercial silver nanoparticle inks and digital fabrication methods. …”
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A study of micromachined displacement pumps for vacuum generation by Zhou, Hui, Ph. D. Massachusetts Institute of Technology

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Giant flexoelectric polarization in a micromachined ferroelectric diaphragm by Zhu, Weiguang, Wang, Zhihong, Zhang, Xi Xiang, Wang, Xianbin, Yue, Weisheng, Li, Jingqi, Miao, Jianmin

“…Here, it is shown that giant flexoelectric polarization can reverse remnant ferroelectric polarization in a bent Pb(Zr0.52Ti0.48)O3 (PZT) diaphragm fabricated by micromachining. The polarization induced by the strain gradient and the switching behaviors of the polarization in response to an external electric field are investigated by observing the electromechanical coupling of the diaphragm. …”
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Controller design for nonlinear micromachined parallel plate actuators by Nikapanah Mohammad Hossein

“…The use of electrostatic actuation for microelectromechanical systems (MEMS) is attractive because of the high energy densities and large forces available in microscale devices. Nonlinear micromachined electrostatic parallel plate microactuators which work by electrostatic actuation, play an important role in MEMS. …”
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Micromachined tunable laser sources : design, fabrication and experiments by Cai, Hong

“…This doctorate thesis focuses on the design, fabrication and experiments of micromachined tunable laser sources using micro electromechanical systems (MEMS) technology. …”
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Micromachined thermistor bolometer for clinical tympanic thermometer application by Ng, Teck Chiew.

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Micromachined liquid dispenser array for 3D printer by Bong, Teck Keong.

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A laser-micromachined polymeric membraneless fuel cell by Li, Aidan, Chan, Siew Hwa, Nguyen, Nam-Trung

“…Laser micromachining was employed to make the flow channel and electrode substrate based on PMMA. …”
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