Radio frequency microelectromechanical systems (RF-MEMS) systems design by Chan, Winston Qingyao.

“…Radio-frequency Microelectromechanical Systems (RFMEMs) are collections of micro-scaled components such as filters and oscillators that generate electrical activity via mechanical movement and electrical excitation, composed of inductors and capacitors and widely applied in communication systems which occupy the upper end of the RF spectrum. …”
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Practical guide to RF-MEMS / by 579679 Iannacci, Jacopo author

Subjects: “…Radio frequency microelectromechanical systems…”

Handbook of MEMS for wireless and mobile applications / by Uttamchandani, Deepak

Subjects:

A Reconfigurable Spiral Antenna for Adaptive MIMO Systems by Cetiner Bedri A., Qian J. Y., Li G. P., De Flaviis F.

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Manufacturing and Testing of Radio Frequency MEMS Switches Using the Complementary Metal Oxide Semiconductor Process by Zung-You Tsai, Po-Jen Shih, Yao-Chuan Tsai, Ching-Liang Dai

“…A radio frequency microelectromechanical system switch (MSS) manufactured by the complementary metal oxide semiconductor (CMOS) process is presented. …”
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Implementation of Highly Reliable Contacts for RF MEMS Switches by Lili Jiang, Lifeng Wang, Xiaodong Huang, Zhen Huang, Min Huang

“…A contact is the key structure of RF MEMS (Radio Frequency Microelectromechanical System) switches, which has a direct impact on the switch’s electrical and mechanical properties. …”
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A Novel 3D Encapsulation Structure Based on Subwavelength Structure and Inserted Pyrex Glass for RF MEMS Infrared Detectors by Jicong Zhao, Mingmin Ge, Chenguang Song, Ling Sun, Haiyan Sun

“…A novel wafer-level three-dimensional (3D) encapsulation structure was designed for radio-frequency microelectromechanical system (RF MEMS) infrared detectors and investigated by using the finite element method (FEM) simulation. …”
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Flexible radio-frequency micro electro-mechanical switch towards the applications of satellite communications by Yingli Shi, Chao Zhou, Zibo Cao, Yurong He, Jingwen Guo, Chunxin Li, Qianhong Wu, Kui Liang, Yanzhao Li, Yuan Lin

“…Abstract This paper presents a flexible radio-frequency microelectromechanical system (RF MEMS) switch integrated on cyclo-olefin polymer (COP) substrate using a modified surface MEMS processing technology, which could be used in the 17–19 GHz frequency band of satellite communication. …”
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Design, Fabrication and Measurement of Radio Frequency Micro-Electro-Mechanical Systems by Girija Sravani Kondavitee, Young Suh Song, Srinivasa Rao Karumuri, Koushik Guha, Brajesh Kumar Kaushik, Aime Lay-Ekuakille

“…This article describes the fabrication and experimental results of a novel step structure Radio Frequency Microelectromechanical system (RF MEMS) switch integrated with a circular patch antenna. …”
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RF MEMs devices development for telecommunications by Liu, Ai Qun, Yu, Aibin, Tang, Min, Muhammad Faeyz Karim, Zhang, Xinjun, Win Palei

“…Radio-frequency microelectromechanical systems (RF MEMS) are highly miniaturized devices intended to switch, modulate, filter or tune electrical signal from DC to microwave frequencies. …”
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Efficient multiphysics modeling of microelectromechanical switches by Yongjae Lee, Dejan S. Filipovic

“…Circuit simulations driven modeling approach with embedded multi-physics of capacitive radio frequency microelectromechanical systems switches is presented in this paper. …”
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Design analysis and fabrication of a lateral MEMS microactuator by Chin, Chi Choong

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Thermal conductivity enhancement of aluminum scandium nitride grown by molecular beam epitaxy by Gustavo A. Alvarez, Joseph Casamento, Len van Deurzen, Md Irfan Khan, Kamruzzaman Khan, Eugene Jeong, Elaheh Ahmadi, Huili Grace Xing, Debdeep Jena, Zhiting Tian

“…Aluminum scandium nitride (AlScN) has been receiving increasing interest for radio frequency microelectromechanical systems because of their higher achievable bandwidths owing to the larger piezoelectric response of AlScN compared to AlN. …”
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Thin Film Encapsulation for RF MEMS in 5G and Modern Telecommunication Systems by Anna Persano, Fabio Quaranta, Antonietta Taurino, Pietro Aleardo Siciliano, Jacopo Iannacci

“…In this work, SiN_x/a-Si/SiN_x caps on conductive coplanar waveguides (CPWs) are proposed for thin film encapsulation of radio-frequency microelectromechanical systems (RF MEMS), in view of the application of these devices in fifth generation (5G) and modern telecommunication systems. …”
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