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    Distribution of elastic stress as a function of temperature in a 2-μm redistribution line of Cu measured with X-ray nanodiffraction analysis

    Distribution of elastic stress as a function of temperature in a 2-μm redistribution line of Cu measured with X-ray nanodiffraction analysis by Wei-You Hsu, I-Hsin Tseng, Ching-Yu Chiang, K.N. Tu, Chih Chen

    Published 2022-09-01
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