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    Improved Ferroelectric Properties in Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> Thin Films by Microwave Annealing

    Improved Ferroelectric Properties in Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> Thin Films by Microwave Annealing by Biyao Zhao, Yunting Yan, Jinshun Bi, Gaobo Xu, Yannan Xu, Xueqin Yang, Linjie Fan, Mengxin Liu

    Published 2022-08-01
    Subjects: “…TiN/Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub>/TiN film…”
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