Showing 1 - 2 results of 2 for search '"all-silicon carbide (SiC)"', query time: 0.97s Refine Results
  1. 1
    Hermeticity Analysis on SiC Cavity Structure for All-SiC Piezoresistive Pressure Sensor

    Hermeticity Analysis on SiC Cavity Structure for All-SiC Piezoresistive Pressure Sensor by Baohua Tian, Haiping Shang, Lihuan Zhao, Dahai Wang, Yang Liu, Weibing Wang

    Published 2021-01-01
    Subjects: “…all-silicon carbide (SiC)…”
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    Article
  2. 2
    Wafer Bonding of SiC-AlN at Room Temperature for All-SiC Capacitive Pressure Sensor

    Wafer Bonding of SiC-AlN at Room Temperature for All-SiC Capacitive Pressure Sensor by Fengwen Mu, Yang Xu, Seongbin Shin, Yinghui Wang, Hengyu Xu, Haiping Shang, Yechao Sun, Lei Yue, Tatsurou Tsuyuki, Tadatomo Suga, Weibing Wang, Dapeng Chen

    Published 2019-09-01
    Subjects: “…all-silicon carbide (SiC)…”
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    Article

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