Improving Performance and Breakdown Voltage in Normally-Off GaN Recessed Gate MIS-HEMTs Using Atomic Layer Etching and Gate Field Plate for High-Power Device Applications by An-Chen Liu, Po-Tsung Tu, Hsin-Chu Chen, Yung-Yu Lai, Po-Chun Yeh, Hao-Chung Kuo

Subjects: “…atomic layer etching (ALE)…”
Get full text

Digital Etching of Molybdenum Interconnects Using Plasma Oxidation by Ivan Erofeev, Antony Winata Hartanto, Muhaimin Mareum Khan, Kerong Deng, Krishna Kumar, Zainul Aabdin, Weng Weei Tjiu, Mingsheng Zhang, Antoine Pacco, Harold Philipsen, Angshuman Ray Chowdhuri, Han Vinh Huynh, Frank Holsteyns, Utkur Mirsaidov

Subjects: “…atomic layer etching (ALE)…”
Get full text

Atomic Layer Deposition of Lithium Fluoride Optical Coatings for the Ultraviolet by John Hennessy, Shouleh Nikzad

Subjects: Get full text

Recent Progress of Atomic Layer Technology in Spintronics: Mechanism, Materials and Prospects by Yuanlu Tsai, Zhiteng Li, Shaojie Hu

Subjects: Get full text

Layer Number Controllable Molybdenum Disulfide Film Growth and Its Applications in Vertical and Planar Photodetectors by Yu‐Han Huang, Zhi‐Wei Chen, Chao‐Hsin Wu, Po‐Tsung Lee, Shih‐Yen Lin

Subjects: Get full text

The Atomic Layer Etching Technique with Surface Treatment Function for InAlN/GaN Heterostructure by Fangzhou Du, Yang Jiang, Zhanxia Wu, Honghao Lu, Jiaqi He, Chuying Tang, Qiaoyu Hu, Kangyao Wen, Xinyi Tang, Haimin Hong, Hongyu Yu, Qing Wang

Subjects: Get full text

Plasma-Assisted Nanofabrication: The Potential and Challenges in Atomic Layer Deposition and Etching by William Chiappim, Benedito Botan Neto, Michaela Shiotani, Júlia Karnopp, Luan Gonçalves, João Pedro Chaves, Argemiro da Silva Sobrinho, Joaquim Pratas Leitão, Mariana Fraga, Rodrigo Pessoa

Subjects: Get full text

The Effect of Doping on the Digital Etching of Silicon-Selective Silicon–Germanium Using Nitric Acids by Yangyang Li, Huilong Zhu, Zhenzhen Kong, Yongkui Zhang, Xuezheng Ai, Guilei Wang, Qi Wang, Ziyi Liu, Shunshun Lu, Lu Xie, Weixing Huang, Yongbo Liu, Chen Li, Junjie Li, Hongxiao Lin, Jiale Su, Chuanbin Zeng, Henry H. Radamson

Subjects: Get full text

Investigation on Ge_0.8Si_0.2-Selective Atomic Layer Wet-Etching of Ge for Vertical Gate-All-Around Nanodevice by Lu Xie, Huilong Zhu, Yongkui Zhang, Xuezheng Ai, Junjie Li, Guilei Wang, Anyan Du, Zhenzhen Kong, Qi Wang, Shunshun Lu, Chen Li, Yangyang Li, Weixing Huang, Henry H. Radamson

Subjects: Get full text