Showing 1 - 1 results of 1 for search '"copper nitride (Cu<sub>3</sub>N) thin films"', query time: 0.81s Refine Results
  1. 1
    Enhanced Electrical Properties of Copper Nitride Films Deposited via High Power Impulse Magnetron Sputtering

    Enhanced Electrical Properties of Copper Nitride Films Deposited via High Power Impulse Magnetron Sputtering by Yin-Hung Chen, Pei-Ing Lee, Shikha Sakalley, Chao-Kuang Wen, Wei-Chun Cheng, Hui Sun, Sheng-Chi Chen

    Published 2022-08-01
    Subjects: “…copper nitride (Cu<sub>3</sub>N) thin films…”
    Get full text
    Article

Search Tools: