Role of Ambient Hydrogen in HiPIMS-ITO Film during Annealing Process in a Large Temperature Range by Ming-Jie Zhao, Jin-Fa Zhang, Jie Huang, Zuo-Zhu Chen, An Xie, Wan-Yu Wu, Chien-Jung Huang, Dong-Sing Wuu, Shui-Yang Lien, Wen-Zhang Zhu

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