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    The Atomic Layer Etching Technique with Surface Treatment Function for InAlN/GaN Heterostructure

    The Atomic Layer Etching Technique with Surface Treatment Function for InAlN/GaN Heterostructure by Fangzhou Du, Yang Jiang, Zhanxia Wu, Honghao Lu, Jiaqi He, Chuying Tang, Qiaoyu Hu, Kangyao Wen, Xinyi Tang, Haimin Hong, Hongyu Yu, Qing Wang

    Published 2022-05-01
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