An Endpoint Detection System for Ion Beam Etching Using Optical Emission Spectroscopy by Junjie Zhang, Jiahui Luo, Xudong Zou, Jiamin Chen

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Characterization of Chiral Nanostructured Surfaces Made via Colloidal Lithography by Sabine Portal, Carles Corbella, Oriol Arteaga, Alexander Martin, Trinanjana Mandal, Bart Kahr

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Local piezoelectric properties of perforated ferroelectric barium–strontium titanate films by N. E. Sherstyuk

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Improvement of the optical properties after surface error correction of aluminium mirror surfaces by M. Ulitschka, J. Bauer, F. Frost, T. Arnold

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Fabrication and characterization of NbTi microwave superconducting resonators by Roberto Russo, André Chatel, Nergiz Şahin Solmaz, Reza Farsi, Hernán Furci, Juergen Brugger, Giovanni Boero

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Controllable Fabrication of Non-Close-Packed Colloidal Nanoparticle Arrays by Ion Beam Etching by Jie Yang, Mingling Zhang, Xu Lan, Xiaokang Weng, Qijiang Shu, Rongfei Wang, Feng Qiu, Chong Wang, Yu Yang

Subjects: “…Ion beam etching…”
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Optimization of etching processes for the fabrication of smooth silicon carbide membranes for applications in quantum technology by Mahsa Mokhtarzadeh, Maria Carulla, Roksolana Kozak, Christian David

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A large-size and polarization-independent two dimensional grating fabricated by scanned reactive-ion-beam etching by Zhang Wei, Li Wenhao, Zhang Tong, Zheng Zhongming, Chi Zhendong, Jiang Yanxiu, Wu Na

Subjects: “…scanned reactive-ion-beam etching…”
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Large Dense Periodic Arrays of Vertically Aligned Sharp Silicon Nanocones by Dirk Jonker, Erwin J. W. Berenschot, Niels R. Tas, Roald M. Tiggelaar, Arie van Houselt, Han J. G. E. Gardeniers

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Features of the formation of an array of isolated polymer P(VDF-TrFE) nanoparticles in pores of a periodic nanostructured silicon oxide membrane by A.N. Belov, N.V. Vostrov, G.N. Pestov, A.V. Solnyshkin

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Degradation mechanism of degenerate n-GaN ohmic contact induced by ion beam etching damage by Xinkun Zhang, Haoran Qie, Yu Zhou, Yaozong Zhong, Jianxun Liu, Quan Dai, Qian Li, Xiaoning Zhan, Xiaolu Guo, Xin Chen, Qian Sun, Hui Yang

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