An Improved Humidity Sensor with GO-Mn-Doped ZnO Nanocomposite and Dimensional Orchestration of Comb Electrode for Effective Bulk Manufacturing by Balashanmugam Priyadharshini, Prasad Valsalal

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Digital Etching of Molybdenum Interconnects Using Plasma Oxidation by Ivan Erofeev, Antony Winata Hartanto, Muhaimin Mareum Khan, Kerong Deng, Krishna Kumar, Zainul Aabdin, Weng Weei Tjiu, Mingsheng Zhang, Antoine Pacco, Harold Philipsen, Angshuman Ray Chowdhuri, Han Vinh Huynh, Frank Holsteyns, Utkur Mirsaidov

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Two-in-one strategy for optimizing chemical and structural properties of carbon felt electrodes for vanadium redox flow batteries by Sung Joon Park, Min Joo Hong, Ye Ji Ha, Jeong-In Choi, Ki Jae Kim

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Machine Learning Approaches for Fault Detection in Semiconductor Manufacturing Process: A Critical Review of Recent Applications and Future Perspectives by V. Arpitha, A. K. Pani

Subjects: “…metal etch process…”
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Low-Damage Reactive Ion Etching of Nanoplasmonic Waveguides with Ultrathin Noble Metal Films by Alina A. Dobronosova, Anton I. Ignatov, Olga S. Sorokina, Nikolay A. Orlikovskiy, Michail Andronik, Aleksey R. Matanin, Kirill O. Buzaverov, Daria A. Ezenkova, Sergey A. Avdeev, Dimitry A. Baklykov, Vitaly V. Ryzhkov, Aleksander M. Merzlikin, Aleksander V. Baryshev, Ilya A. Ryzhikov, Ilya A. Rodionov

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Etching Chemistry Process Optimization of Ethylene Diluted with Helium (C₂H₄/He) in Interconnect Integration by Hwa-Rim Lee, Eun-Su Jung, Jin-Uk Yoo, Tae-Min Choi, Sung-Gyu Pyo

Subjects: “…metal etch…”
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