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1
Three-axis piezoresistive accelerometer with adjustable axial resolutions
Published 2012-03-01Subjects: “…MicroElectroMechanical Systems (MEMS)…”
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2
A Novel MEMS Capacitor with a Side Wall for High Tuning Ranges
Published 2022-10-01Subjects: Get full text
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3
Micro-electro-mechanical systems (MEMS): Technology for the 21st century
Published 2014-01-01Subjects: “…Micro-electro-mechanical systems (MEMS)…”
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4
CONSIDERATIONS REGARDING THE USE OF SU-8 PHOTORESIST IN MEMS TECHNIQUE
Published 2018-09-01Subjects: Get full text
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5
Modeling of a Passive-Valve Piezoelectric Micro-Pump: A Parametric Study
Published 2020-07-01Subjects: “…micro-electro-mechanical systems (MEMS)…”
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6
NEW DESIGN OF A BRIDGE FENDER-LIKE ANTI-HIGH OVERLOADING ACCELEROMETER
Published 2021-01-01Subjects: Get full text
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7
Development of Dual-Axis MEMS Accelerometers for Machine Tools Vibration Monitoring
Published 2016-07-01Subjects: “…Dual-Axis micro electro mechanical systems (MEMS) accelerometer…”
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8
A PEDESTRIAN STEP COUNTING PARAMETER DETECTION METHOD AIDED WITH ANGULAR VELOCITY INFORMAITON
Published 2017-01-01Subjects: Get full text
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9
3D heterostructures and systems for novel MEMS/NEMS
Published 2009-01-01Subjects: “…micro-electro-mechanical systems (MEMS)…”
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10
A Fast Multiobjective Optimization Strategy for Single-Axis Electromagnetic MOEMS Micromirrors
Published 2017-12-01Subjects: “…Micro-electro-mechanical systems (MEMS)…”
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11
Cost-Efficient Wafer-Level Capping for MEMS and Imaging Sensors by Adhesive Wafer Bonding
Published 2016-10-01Subjects: “…micro electro-mechanical systems (MEMS)…”
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12
The performance improvement of a lowcost INS/GPS integration system using the street return algorithm
Published 2012-11-01Subjects: “…MicroElectroMechanical Systems (MEMS)…”
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13
A Low-Cost Chamber Prototype for Automatic Thermal Analysis of MEMS IMU Sensors in Tilt Measurements Perspective
Published 2019-06-01Subjects: “…Micro Electro-Mechanical Systems (MEMS)…”
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14
Advancements and Potential Applications of Microfluidic Approaches—A Review
Published 2018-10-01Subjects: Get full text
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15
FEM-Analysis of 2D Micromachined Flow Transduers based on aGe-Thermistor Arrays and a Double Bridge Readout
Published 2019-08-01Subjects: “…micro-electro-mechanical systems (MEMS)…”
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16
Error and Performance Analysis of MEMS-based Inertial Sensors with a Low-cost GPS Receiver
Published 2008-03-01Subjects: Get full text
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17
Laboratory evaluation of a low‐cost micro electro‐mechanical systems sensor for inclination and acceleration monitoring
Published 2025-03-01Subjects: Get full text
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18
Genetic Algorithm for the Design of Electro-Mechanical Sigma Delta Modulator MEMS Sensors
Published 2011-09-01Subjects: Get full text
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19
Built-In Self-Test (BIST) Methods for MEMS: A Review
Published 2020-12-01Subjects: “…micro-electro-mechanical systems (MEMS) test…”
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20
Separation of Nano- and Microparticle Flows Using Thermophoresis in Branched Microfluidic Channels
Published 2019-05-01Subjects: Get full text
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