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Handbook of Microelectromechanical Systems /
Published 2012Subjects: “…Microelectromechanical systems…”
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Introduction to microelectromechanical systems engineering /
Published 2004Subjects: “…Microelectromechanical systems…”
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Computer Microvision for Microelectromechanical Systems
Published 2010Subjects: “…Computer Microvision for Microelectromechanical Systems…”
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Handbook of Molecular Electronics and Microelectromechanical Systems /
Published 2012“…This is a well written Handbook of Molecular Electronics and Microelectromechanical Systems.…”
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Microelectromechanical Systems (MEMS) for Biomedical Applications
Published 2022-01-01“…The significant advancements within the electronics miniaturization field have shifted the scientific interest towards a new class of precision devices, namely microelectromechanical systems (MEMS). Specifically, MEMS refers to microscaled precision devices generally produced through micromachining techniques that combine mechanical and electrical components for fulfilling tasks normally carried out by macroscopic systems. …”
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Hydraulic amplification for actuation in microelectromechanical systems
Published 2005Get full text
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Concepts and Key Technologies of Microelectromechanical Systems Resonators
Published 2022-12-01Get full text
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Ceramics for Microelectromechanical Systems Applications: A Review
Published 2024-10-01Get full text
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Microelectromechanical Systems Based on Magnetic Polymer Films
Published 2022-02-01Subjects: Get full text
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Review of flexible microelectromechanical system sensors and devices
Published 2021-06-01“…Today, the vast majority of microelectromechanical system (MEMS) sensors are mechanically rigid and therefore suffer from disadvantages when used in intimately wearable or bio-integrated applications. …”
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Terahertz Detectors Using Microelectromechanical System Resonators
Published 2023-06-01Subjects: Get full text
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High-Frequency Grating-Based Microelectromechanical Systems Actuator
Published 2024-04-01Get full text
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Techniques and Considerations in the Microfabrication of Parylene C Microelectromechanical Systems
Published 2018-08-01“…Parylene C is a promising material for constructing flexible, biocompatible and corrosion-resistant microelectromechanical systems (MEMS) devices. Historically, Parylene C has been employed as an encapsulation material for medical implants, such as stents and pacemakers, due to its strong barrier properties and biocompatibility. …”
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