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1
A 2D Waveguide Method for Lithography Simulation of Thick SU-8 Photoresist
Published 2020-10-01Subjects: Get full text
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2
Extracting mechanical and microstructural properties of Cu–Zr thin film alloys by MEMS, AFM and ellipsometer
Published 2023-01-01Subjects: Get full text
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3
Development of an Implantable Capacitive Pressure Sensor for Biomedical Applications
Published 2023-04-01Subjects: Get full text
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4
Utilizing multiple BioMEMS sensors to monitor orthopaedic strain and predict bone fracture healing
Published 2021Subjects: Get full text
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Advances in multiphysics simulation and experimental testing of MEMS /
Published 2008Subjects: “…Microelectromechanical systems…”
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Handbook of silicon based MEMS materials and technologies /
Published 2010Subjects: “…Microelectromechanical systems…”
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MEMS cost analysis : from laboratory to industry /
Published 2014Subjects: “…Microelectromechanical systems…”
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9
Mask-Type Sensor for Pulse Wave and Respiration Measurements and Eye Blink Detection
Published 2021-07-01Subjects: Get full text
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10
Design and Fabrication of a Kirigami-Inspired Electrothermal MEMS Scanner with Large Displacement
Published 2020-03-01Subjects: Get full text
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11
Modeling of Multifunctional Thermoresistive Transduser Used Heat Exchange Technology
Published 2019-04-01Subjects: “…microelectromechanical system…”
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12
Review of Piezoelectric Micromachined Ultrasonic Transducers for Rangefinders
Published 2023-02-01Subjects: Get full text
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15
A Calibration Algorithm for Microelectromechanical Inertial Sensors
Published 2022-09-01Subjects: Get full text
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16
Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis
Published 2013-12-01Subjects: “…microelectromechanical system (MEMS) resonator…”
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17
Fabrication of Thermal Conductivity Detector Based on MEMS for Monitoring Dissolved Gases in Power Transformer
Published 2019-12-01Subjects: “…microelectromechanical system…”
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18
Terahertz Detectors Using Microelectromechanical System Resonators
Published 2023-06-01Subjects: Get full text
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19
Fabrication and Characterization of a Flexible Thin-Film-Based Array of Microelectrodes for Corneal Electrical Stimulation
Published 2023-10-01Subjects: “…microelectromechanical system…”
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20
MEMS enabled suspended silicon waveguide platform for long-wave infrared modulation applications
Published 2022-12-01Subjects: Get full text
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