Showing 1 - 4 results of 4 for search '"microoptoelectromechanical systems"', query time: 0.07s Refine Results
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    TECHNOLOGIES OF NANOSIZED STRUCTURES FOR DISPLAY AND OPTICAL APPLICATIONS by I. V. Timoshkov, V. I. Kurmashev, A. A. Sakova, V. I. Timoshkov

    Published 2019-06-01
    “…The prospects of these materials and technologies for advanced applications such as roll-to-roll technology (holographic matrixes), nanoimprint, optical retarders and nanograting, polarizers, functional optical layers, microoptoelectromechanical systems are considered.…”
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    Wideband MOEMS for the Calibration of Optical Readout Systems by Petr Volkov, Andrey Lukyanov, Alexander Goryunov, Daniil Semikov, Evgeniy Vopilkin, Stanislav Kraev, Andrey Okhapkin, Anatoly Tertyshnik, Ekaterina Arkhipova

    Published 2021-11-01
    “…The paper proposes a technology based on UV-LIGA process for microoptoelectromechanical systems (MOEMS) manufacturing. We used the original combination of materials and technological steps, in which any of the materials does not enter chemical reactions with each other, while all of them are weakly sensitive to the effects of oxygen plasma. …”
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    Review on Metasurfaces: An Alternative Approach to Advanced Devices and Instruments by Xiaoguang Zhao, Zhenci Sun, Lingyun Zhang, Zilun Wang, Rongbo Xie, Jiahao Zhao, Rui You, Zheng You

    Published 2022-01-01
    “…Previous studies demonstrated promising applications of metasurfaces including but not limited to optical imaging instruments, biochemical sensing devices, and multifunctional microoptoelectromechanical systems (MOEMS). Significant performance improvement of devices and instruments has been achieved due to the implementation of specially tailored metasurfaces. …”
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