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Investigation of Integrated Reactive Multilayer Systems for Bonding in Microsystem Technology
Published 2021-10-01“…The results of this study will promote the growth of reactive multilayer systems by electron beam evaporation processing and their potential integration as local heat sources on Si-wafer substrates for bonding applications in microelectronics and microsystems technology.…”
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Heat Exchange in a Contact Zone of Nanoinstrumentation with Elements of the Microsystem Technology
Published 2023-06-01“…As a result, the mechanisms of energetic interaction of the nanoinstrument with the surfaces of the elements of microsystem technology devices were clarified. It is shown that the use of the proposed method of equivalent thermal circuits for the evaluation of mathematical models of the energy interaction of nanoinstruments with the surfaces of microsystem technology device elements, as well as the further study of the distribution of thermal fields in the nanocontact zone, differs from other numerical and analytical methods in terms of sufficient accuracy and speed of calculations. …”
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Report to the President for year ended June 30, 2023, Microsystems Technology Laboratories
Published 2024“…This report contains the following sections: Integration of Microsystems Technology Laboratories and Research Laboratory of Electronics; Industry Engagements; MARC; Microsystems Annual Research Report; MTL Research; MTL/MIT.nano Collaboration and Facilities Update; MTL Outreach and Educational Activities; MTL Core Faculty Promotions, Awards, and Honors…”
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Assembly of a Pulmonary Artery Pressure Sensor System
Published 2010-01-01Subjects: Get full text
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Analysis, design, and implementation of charge-to-digital converters
Published 2005Subjects: “…Microsystems Technology Laboratories.…”
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Magnetic Shape Memory Microactuators
Published 2014-11-01Subjects: “…microsystems technology…”
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An Integrated Thermal Compensation System for MEMS Inertial Sensors
Published 2014-03-01Get full text
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Measuring the Flex Life of Conductive Yarns in Narrow Fabric
Published 2023-01-01Get full text
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Development and Washing Reliability Testing of a Stretchable Circuit on Knit Fabric
Published 2020-12-01Get full text
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Feasibility of Parylene C for encapsulating piezoelectric actuators in active medical implants
Published 2023-11-01Get full text
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Crystallographic Services and Technology Support for Industry
Published 2014-02-01Get full text
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