Showing 1 - 2 results of 2 for search '"nanometer gap"', query time: 0.18s Refine Results
  1. 1
    Fast-Response Electrostatic Actuator Based on Nano-Gap

    Fast-Response Electrostatic Actuator Based on Nano-Gap by Edward Kostsov, Alexei Sokolov

    Published 2017-03-01
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    Article
  2. 2
    Validation of correction method for gap shape measurement by vertical-objective-type ellipsometric microscopy with rotating-compensator ellipsometry

    Validation of correction method for gap shape measurement by vertical-objective-type ellipsometric microscopy with rotating-compensator ellipsometry by Katsuya NAMBA, Yusuke SASAO, Kenji FUKUZAWA, Shintaro ITOH, Hedong ZHANG

    Published 2019-04-01
    Subjects: “…nanometer gap…”
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    Article

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