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    An Integrated Microfabricated Chip with Double Functions as an Ion Source and Air Pump Based on LIGA Technology

    An Integrated Microfabricated Chip with Double Functions as an Ion Source and Air Pump Based on LIGA Technology by Hua Li, Linxiu Jiang, Chaoqun Guo, Jianmin Zhu, Yongrong Jiang, Zhencheng Chen

    Published 2017-01-01
    Subjects: “…needle-to-cylinder…”
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