Deep reactive ion etching of silicon moulds for the fabrication of diamond x-ray focusing lenses by Malik, A, Fox, O, Alianelli, L, Korsunsky, A, Stevens, R, Loader, I, Wilson, M, Pape, I, Sawhney, K, May, P

“…High-quality silicon moulds were made using photolithography and deep reactive ion etching. The study of the etch process conducted to achieve silicon moulds with vertical sidewalls and minimal surface roughness is discussed. …”

Detection of Aeromonas hydrophila using fiber optic microchannel sensor by Gauri, Samla, Zainal Abidin, Zurina, Kamuri, Mohd Firdaus, Mahdi, Mohd Adzir, Md Yunus, Nurul Amziah

“…Microchannel was fabricated by photolithography method. The fiber optic was chosen as signal transmitting medium and light absorption characteristic of different microorganisms was investigated for possible detection. …”
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MMI-MZI polymer thermo-optic switch with a high refractive index contrast by Al-Hetar, Abdulaziz Mohammed, Mohammad, Abu Bakar, Mohd. Supa'at, Abu Sahmah, Shamsan, Zaid Ahmed

“…The fabrication was done using standard fabrication techniques such as coating, photolithography, and dry etching. A crosstalk level of -28.6 dB has been achieved. …”

Electrical behavior of nanocrystalline graphite/p-Si Schottky diode by Sultan, S. M., Pu, S. H., Fishlock, S. J., Wah, L. H., Chong, H. M. H., McBride, J. W.

“…The NCG/p-Si Schottky diodes were fabricated on a 6-inch wafer by metal-free catalyst plasma enhanced chemical vapour deposition (PECVD) and photolithography pattern transfer method. The NCG film consists of nanoscale grains of ∼35 nm in size. …”

512-Channel Geometric Droplet-Splitting Microfluidic Device by Injection of Premixed Emulsion for Microsphere Production by Chul Min Kim, Hye Jin Choi, Gyu Man Kim

“…The presented microfluidic device was fabricated using conventional photolithography and polydimethylsiloxane casting. The fabricated microfluidic device consisted of 512 channels with 256 T-junctions in the last branch. …”
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Progress and Perspectives in Designing Flexible Microsupercapacitors by La Li, Chuqiao Hu, Weijia Liu, Guozhen Shen

“…To meet requirements for the scalable fabrication, minimization design, and easy integration of the flexible MSC, the typical assembled technologies consist of ink printing, photolithography, screen printing, laser etching, etc., are provided. …”
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Advance in additive manufacturing of 2D materials at the atomic and close-to-atomic scale by Yixin Chen, Fengzhou Fang, Nan Zhang

“…While chemical vapor deposition (CVD) can be employed to produce high-quality 2D materials, achieving patterning often relies on photolithography techniques, which limit scalability and introduce impurities. …”
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Micromachining of Soft Polymer Material applying Cryogenic Cooling by Yasuhiro KAKINUMA, Nobuhito YASUDA, Tojiro AOYAMA

“…The pattern of micro channels on the PDMS plate is usually fabricated through the photolithography and micro molding process. However, the photolithographic method requires multi chemical and mechanical processes and resultant long process time. …”
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Development of Catheter Flow Sensor for Breathing Measurements at Different Levels of Tracheobronchial Airway by Tomohiro Fujinori, Yoshihiro Hasegawa, Miyoko Matsushima, Tsutomo Kawabe, Mitsuhiro Shikida

“…They were fabricated by using photolithography and heat shrinkable tube packaging processes. …”
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The Design and Fabrication of Large-Area Under-Screen Fingerprint Sensors with Optimized Aperture and Microlens Structures by Chih-Chieh Yeh, Teng-Wei Huang, You-Ren Lin, Guo-Dung Su

“…Through numerical analysis and process constraint adjustment to optimize the structural design, we determined that a modulation transfer function (MTF) of 60.8% can be obtained when the thickness of the black matrix is 4 μm, allowing successful manufacturing using photolithography process technology. Finally, we used this filter element to take fingerprint images. …”
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One-Step Hot Microembossing for Fabrication of Paper-Based Microfluidic Chips in 10 Seconds by Yi-Je Juang, Yu Wang, Shu-Kai Hsu

“…Different methods have been demonstrated to fabricate µPADs such as solid wax printing, craft cutting, photolithography, etc. In this study, one-step hot microembossing was proposed and demonstrated to fabricate µPADs. …”
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Positioning System of Infrared Sensors Based on ZnO Thin Film by Chia-Yu Tsai, Yan-Wen Lin, Hong-Ming Ku, Chia-Yen Lee

“…Infrared sensors incorporating suspended zinc oxide (ZnO) pyroelectric films and thermally insulated silicon substrates are fabricated using conventional MEMS-based thin-film deposition, photolithography, and etching techniques. The responsivity of the pyroelectric film is improved via annealing at 500 °C for 4 h. …”
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Study of PDMS Microchannels for Liquid Crystalline Optofluidic Devices in Waveguiding Photonic Systems by Szymon Baczyński, Piotr Sobotka, Kasper Marchlewicz, Marcin Juchniewicz, Artur Dybko, Katarzyna A. Rutkowska

“…When applying a casting technique, with the molds obtained even by the most accurate method, i.e., photolithography, it is still crucial to inspect the cross-section of the structure and the surface roughness of the PDMS material. …”
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Advanced Fabrication Techniques of Microengineered Physiological Systems by Joseph R. Puryear III, Jeong-Kee Yoon, YongTae Kim

“…Conventional methods of photolithography and etching remain less useful to complex geometric conditions with high precision needed to manufacture the devices, while laser-induced methods have become an alternative for higher precision engineering yet remain costly. …”
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Sensor for the Characterization of 2D Angular Actuators with Picoradian Resolution and Nanoradian Accuracy with Microradian Range by Marco Pisani, Milena Astrua, Srijith Bangaru Thirumalai Raj

“…High precision angular actuators are used for high demanding applications such as laser steering for photolithography. Piezo technology allows developing actuators with a resolution as low as a few nanoradians, with bandwidths as high as several kilohertz. …”
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Formation of submicron relief structures on the surface of sapphire substrates by V.V. Petrov, A.A. Kryuchyn, I.V. Gorbov, A.V. Pankratova, D.Yu. Manko, Yu.O. Borodin, O.V. Shikhovets

“…It is shown that the most effective method of forming relief structures with submicron dimensions is ion beam   etching through a protective mask formed by photolithography. The main problems in creating a microrelief on the surface of sapphire substrates are the removal of static electric charge in the process of ion beam  etching of the substrates, as well as obtaining a protective mask with windows of specified sizes, through which etching of the sapphire substrate is performed.…”
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Achieving Less Than 100 ppb Total Metal Ion Concentration in ESCAP Resins Synthesized by Atom Transfer Radical Polymerization by Yingchao Liu, Jinshan Wang, Weimin Li

“…Abstract In the photolithography process of integrated circuits （IC） manufacturing, it is desired that the photoresist resins have both smaller polydispersity index (PDI) and lower trace metal ion concentrations. …”
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A Miniature Fiber Optic Refractive Index Sensor Built in a MEMS-Based Microchannel by Xingwei Wang, Charles Guthy, Ye Tian, Wenhui Wang, Nan Wu, Xiaotian Zou

“…Microelectromechanical systems (MEMS) fabrication techniques, specifically photolithography and deep dry etching, were used to precisely control the profile and depth of the microchannel on the silicon chip with an accuracy of 2 μm. …”
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Flexible sensing platform based on polymer materials for health and exercise monitoring by Junchen Yan, Anping Chen, Shuyun Liu

“…Advances in manufacturing techniques such as printing and photolithography have enabled the scalable fabrication of polymer-based sensor arrays. …”
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Embedding of Ultrathin Chips in Highly Flexible, Photosensitive Solder Mask Resist by Florian Janek, Nadine Eichhorn, Sascha Weser, Kerstin Gläser, Wolfgang Eberhardt, André Zimmermann

“…The contact pads are opened by photolithography using UV direct light exposure. Circular and rectangular openings of 90 µm and 130 µm diameter, respectively, edge length are realized. …”
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