Development of three-dimensional (3D) grayscale Photolithography process for microfluidic curvature Structures by Abdul Hamid, Intan Sue Liana

“…To achieve such control, grayscale photolithography technique has been comprehensively studied as an alternative to the current 3D microfabrication technique. …”
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Nondestructive Direct Photolithography for Patterning Quantum Dot Films by Atomic Layer Deposition of ZnO by Joon Yup Lee, Eun A. Kim, Jisu Han, Yeongho Choi, Donghyo Hahm, Chi Jung Kang, Wan Ki Bae, Jaehoon Lim, Seong‐Yong Cho

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Photolithography Fabricated Spacer Arrays Offering Mechanical Strengthening and Oil Motion Control in Electrowetting Displays by Yingying Dou, Lin Chen, Hui Li, Biao Tang, Alex Henzen, Guofu Zhou

“…Here, we propose a spacer array, which is designed standing on the junction of adjacent pixel walls, fabricated by photolithography. The spacer array provides mechanical strength enhancement and reliable oil motion controllability. …”
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Three-Dimensional Soft Material Micropatterning via Grayscale Photolithography for Improved Hydrophobicity of Polydimethylsiloxane (PDMS) by Intan Sue Liana Abdul Hamid, Beh Khi Khim, Mohammad Faiz Mohamed Omar, Khairu Anuar Mohamad Zain, Nuha Abd Rhaffor, Sofiyah Sal Hamid, Asrulnizam Abd Manaf

“…Various heights of 3D PDMS micropillars were fabricated via grayscale photolithography, and improved wettability was investigated. …”
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Two-Color Pixel Patterning for High-Resolution Organic Light-Emitting Displays Using Photolithography by Yu Min Choi, Han Young Shin, Jongchan Son, Chunhee Park, Keun-Woo Park, Jin-Kyun Lee, Byung Jun Jung

Subjects: “…organic light-emitting diode (OLED), photolithography…”
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Outliers Detection Models in Shewhart Control Charts; an Application in Photolithography: A Semiconductor Manufacturing Industry by Ishaq Adeyanju Raji, Muhammad Hisyam Lee, Muhammad Riaz, Mu’azu Ramat Abujiya, Nasir Abbas

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Integration of pentacene-based thin film transistors via photolithography for low and high voltage applications by Smith, Melissa Alyson

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Development of photolithography for the fabrication of novel GaAs based devices and diamond-like film based devices by Prasad Krishnamachar.

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Large-area three-dimensional optical imaging and subdiffraction photolithography with polydimethylsiloxane (PDMS) nanotip array by Wu, Jin

“…The following three types of near-field photolithography strategies were developed in this work. …”
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Near-field elastomeric mask photolithography fabrication of high-frequency surface acoustic wave transducers by Hesjedal, T, Seidel, W

“…However, by using an elastomeric phase mask derived from a photoresist master (made by conventional photolithography), features as small as 90 nm have been demonstrated. …”

Three-dimensional soft material micropatterning via grayscale photolithography for improved hydrophobicity of Polydimethylsiloxane (PDMS) by Abdul Hamid, Intan Sue Liana, Beh, Khi Khim, Mohamed Omar, Mohammad Faiz, Mohamad Zain, Khairu Anuar, Abd Rhaffor, Nuha, Hamid, Sofiyah Sal, Abd Manaf, Asrulnizam

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Outliers Detection Models in Shewhart Control Charts; an Application in photolithography: A semiconductor manufacturing industry by Raji, Ishaq Adeyanju, Lee, Muhammad Hisyam, Muhammad Riaz, Muhammad Riaz, Abujiya, Mu’azu Ramat, Abbas, Nasir

“…Finally, we implement the findings of the current study in the semiconductor manufacturing industry, where a real dataset is extracted from a photolithography process.…”

Ilford graphic arts manual/ by 212843 Cartwright, Herbert Mills

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Photolithography Fabricated Broadband Waveguide Grating Couplers With 1 dB Bandwidth Over 100 nm by Xuetong Zhou, Hon Ki Tsang

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Batch Fabrication of Broadband Metallic Planar Microlenses and Their Arrays Combining Nanosphere Self-Assembly with Conventional Photolithography by Ping Wang, Xiaochang Yu, Yechuan Zhu, Yiting Yu, Weizheng Yuan

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Fabrication of High‐Performance Devices on Water‐Soluble Lead Halide Perovskites Using Water‐Based Photolithography by Gokul M. A., Atikur Rahman

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Hydrogel Patterns in Microfluidic Devices by Do-It-Yourself UV-Photolithography Suitable for Very Large-Scale Integration by Anthony Beck, Franziska Obst, Mathias Busek, Stefan Grünzner, Philipp J. Mehner, Georgi Paschew, Dietmar Appelhans, Brigitte Voit, Andreas Richter

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Large-area three-dimensional optical imaging and sub-diffraction photolithography with polydimethylsiloxane (PDMS) nanotip array by Wu, Jin

“…The following three types of near-field photolithography strategies were developed in this work. …”
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A low normal force contact using photolithography and Ni-Co electro fine forming technology by Bhuiyan, Moinul, Takemasa, Eiichiro

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Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model: A Case Study by Siow, Yuen Tien

“…In this research, a more realistic representation of photolithography tools that can give a better prediction results and a more systematic methodology for minimizing photolithography cycle time is presented. …”
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