Photolithography based achromatic metasurface/metalens by Gan, Shiyu

“…These nanostructures are typically made using materials such as silicon or titanium dioxide, and are patterned using methods such as photolithography or electron beam lithography. One of the key advantages of metalenses is that they can be made much thinner and more compact than traditional lenses, which can be useful for applications such as smartphones and other portable devices. …”
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Reconfigurable phase-change photomask for grayscale photolithography by Wang, Q., Yuan, Guanghui, Kiang, K. S., Sun, K., Gholipour, B., Rogers, E. T. F., Huang, K., Ang, S. S., Zheludev, Nikolay I., Teng, J. H.

“…We demonstrate a grayscale photolithography technique which uses a thin phase-change film as a photomask to locally control the exposure dose and allows three-dimensional (3D) sculpting photoresist for the manufacture of 3D structures. …”
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Parallel scanning near-field photolithography: the Snomipede by Ul-Haq, Ehtsham, Liu, Zhuming, Zhang, Yuan, Alang Ahmad, Shahrul Ainliah, Wong, Lu Shin, Armes, Steven P., Hobbs, Jamie K., Leggett, Graham J., Micklefield, Jason, Roberts, Clive J., Weaver, John M. R.

“…Here we fuse the “Millipede” concept with scanning near-field photolithography to yield a “Snomipede” that is capable of executing parallel chemical transformations at high resolution over macroscopic areas. …”
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Negative index metamaterial at ultraviolet range for subwavelength photolithography by Jin Qijian, Liang Gaofeng, Kong Weijie, Liu Ling, Wen Zhongquan, Zhou Yi, Wang Changtao, Chen Gang, Luo Xiangang

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A practical perspective for chromatic orthogonality for implementing in photolithography by Godlaveeti Sreenivasa Kumar, Mizaj Shabil Sha, Swathi Yempally, John-John Cabibihan, Kishor Kumar Sadasivuni

“…This work provides a new perspective to validate NiS/ZnO photocatalysts for predicting the wavelength of different light sources and to apply in photolithography.…”
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Proximity Effect in Gate Fabrication Using Photolithography Technique by Joanna Prazmowska, Kornelia Indykiewicz, Bogdan Paszkiewicz, Regina Paszkiewicz

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Low-cost photolithography system for cell biology labs by Naggay Benjamin K., Frey Kerstin, Schneider Markus, Athanasopulu Kiriaki, Lorenz Günter, Kemkemer Ralf

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Selectively Micro-Patternable Fibers via In-Fiber Photolithography by Lee, Youngbin, Canales, Andres, Loke, Gabriel, Kanik, Mehmet, Fink, Yoel, Anikeeva, Polina

“…Here, thermal drawing and photolithography are combined to produce a scalable method for deterministically breaking axial symmetry within multimaterial fibers. …”
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Selectively Micro-Patternable Fibers via In-Fiber Photolithography by Lee, Youngbin, Canales, Andres, Loke, Gabriel, Kanik, Mehmet, Fink, Yoel, Anikeeva, Polina

“…Here, thermal drawing and photolithography are combined to produce a scalable method for deterministically breaking axial symmetry within multimaterial fibers. …”
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Micro-layered-photolithography for Micro-Fabrication and Micro-Molding by Tang, Y., Loh, Han Tong, Fuh, J.-Y.-H., Lu, L., Wong, Yeow Sheong, Thian, S. C. H.

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An application of incremental scheduling to a cluster photolithography tool by Ware, Simon, Su, Rong

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Cryogenic two-photon laser photolithography with SU-8 by Lee, K, Green, A, Taylor, R, Sharp, D, Turberfield, A, Brossard, F, Williams, D, Briggs, G

Cryogenic two-photon laser photolithography with SU-8 by Lee, K, Green, A, Taylor, R, Sharp, D, Turberfield, A, Brossard, F, Williams, D, Briggs, G, Briggs, G

“…We have shown that photolithography can be used to create alignment markers on a semiconductor substrate at cryogenic temperatures. …”

Cryogenic two-photon laser photolithography with SU-8 by Lee, K, Green, A, Taylor, R, Sharp, D, Turberfield, A, Brossard, F, Williams, D, Briggs, G

“…We have shown that photolithography can be used to create alignment markers on a semiconductor substrate at cryogenic temperatures. …”

Well-defined in-textile photolithography towards permeable textile electronics by Pengwei Wang, Xiaohao Ma, Zhiqiang Lin, Fan Chen, Zijian Chen, Hong Hu, Hailong Xu, Xinyi Zhang, Yuqing Shi, Qiyao Huang, Yuanjing Lin, Zijian Zheng

“…Herein, we developed a universal and robust in-textile photolithography strategy for precise and uniform metal patterning on porous textile architectures. …”
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One-Shot Fabrication of Polymeric Hollow Microneedles by Standard Photolithography by Principia Dardano, Selene De Martino, Mario Battisti, Bruno Miranda, Ilaria Rea, Luca De Stefano

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A Customizable and Low-Cost Ultraviolet Exposure System for Photolithography by David Eun Reynolds, Olivia Lewallen, George Galanis, Jina Ko

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Investigation into Photolithography Process of FPCB with 18 µm Line Pitch by Ke Sun, Gai Wu, Kang Liang, Bin Sun, Jian Wang

“…Due to the widespread application of flexible printed circuit boards (FPCBs), attention is increasing being paid to photolithography simulation with the continuous development of ultraviolet (UV) photolithography manufacturing. …”
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Fabrication of Large Area Periodic Nanostructures Using Nanosphere Photolithography by Wu Wei, Dey Dibyendu, Memis Omer, Katsnelson Alex, Mohseni Hooman

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Precision six degrees of freedom magnetically-levitated photolithography stage by Williams, Mark E. (Mark Edd)

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