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    Enhancing the Shock Response Performance of Micromachined Silicon Resonant Accelerometers by Electrostatic Active Damping Control

    Enhancing the Shock Response Performance of Micromachined Silicon Resonant Accelerometers by Electrostatic Active Damping Control by Libin Huang, Kai Jiang, Peng Wang, Meimei Zhang, Xukai Ding, Hongsheng Li

    Published 2021-12-01
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