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    Micro-systems mechanics Vol. IV by Lin, Rongming, David J. Ewins

    Published 2008
    “…In this work, we present a novel micro electrostatic actuator capable of 2-dimensional fine motion. Served as a secondary motion control to both the voice coil motor and air bearing system (ABS), this micro machined electrostatic actuator will be monolithically integrated with the read/write head element. …”
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    Research Report
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