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    Characterization of thin films by filtered cathodic vacuum arc technology by Lau, Daniel Shu Ping, Yu, Siu Fung, Tay, Beng Kang

    Published 2008
    “…Nanocomposite amorphous carbon (a-C:Me) films including a-C:Ni,a-C:Co,a-C:Ti,a-C:W,a-C:Fe,a-C:Al,anda-C:Si films were deposited using metal-carbon composite target by filtered cathodic vacuum arc (FCVA) technique. …”
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    Research Report
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