Published 2021-07-01
“…To improve the signal quality and reduce disturbing interferences, the optical design was revised in comparison to the systems of others (Dorozhovets et al., 2006;
Balzer et al., 2011; Hausotte et al., 2012). The integration of the MAFM head in a nanomeasuring machine (NMM-1) offers the possibility of large-scale measurements over a range of <span class="inline-formula"><math xmlns="http://www.w3.org/1998/Math/MathML" id="M1" display="inline" overflow="scroll" dspmath="mathml"><mrow><mn mathvariant="normal">25</mn><mspace linebreak="nobreak" width="0.125em"/><mrow class="unit"><mi mathvariant="normal">mm</mi></mrow><mo>×</mo><mn mathvariant="normal">25</mn><mspace width="0.125em" linebreak="nobreak"/><mrow class="unit"><mi mathvariant="normal">mm</mi></mrow><mo>×</mo><mn mathvariant="normal">5</mn></mrow></math><span><svg:svg xmlns:svg="http://www.w3.org/2000/svg" width="94pt" height="10pt" class="svg-formula" dspmath="mathimg" md5hash="2cabb409
fc347fb662d459be3fafe3d0"><svg:image xmlns:xlink="http://www.w3.org/1999/xlink" xlink:href="jsss-10-171-2021-ie00001.svg" width="94pt" height="10pt" src="jsss-10-171-2021-ie00001.png"/></svg:svg></span></span> mm with sub-nanometre resolution. …”
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