Plasma-aided nanofabrication : from plasma sources to nanoassembly /
19
| Main Authors: | , |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
Weinheim : Wiley-VCH,
2007
|
| Subjects: |
19
| Main Authors: | , |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
Weinheim : Wiley-VCH,
2007
|
| Subjects: |